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Entegris FOUP-FOSB Wafer Tester

A precision load cell and Keyence LVDT enable this machine to measure and record force/position data with a high degree of accuracy. A pair of IAI electric actuators allow the machine to conduct tests at any desired speed, and recipe-driven process parameters allow for a wide variety of products to be tested.

The prior testing method took several minutes to collect each data point. To evaluate the product in a reasonable amount of time, technicians only recorded 5 measurements at each test location. In the time it previously took to obtain a single point of data this equipment can generate 5200 force and position values, display it locally on an HMI, and export the data as a CSV file.

The integration of precision measurement devices with electric actuators now allows the customer to generate far more data in far less time with improved quality and repeatability.

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